MOCVD Heater and Core Parts
Metal Organic Chemical Vapor Deposition (MOCVD) is a chip epitaxy technology for preparing mixed semiconductor devices, metal and its oxide, and metal nitride thin film materials. In the MOCVD system, the crystal growth is mostly under normal pressure or low pressure, and the substrate temperature is 500-1200 °C. In order to grow pure, steep-interface, and consistent thin-film materials, MOCVD equipment needs to provide a suitable environment for chemical reactions. The heating system is an important part of MOCVD equipment. Whether it can heat the substrate quickly and uniformly directly affects the quality of film deposition, thickness consistency, and the performance of the chip.
The working conditions of MOCVD heaters are very harsh, requiring long continuous working time, high temperature, high heat flux and repeated heating and cooling. The resistance sheet is the core part of the heater. After a certain current is applied, the resistance sheet generates heat and becomes the heat source of the whole device. When the surface temperature of the graphite plate used to place the substrate is 1350K, the temperature of the resistance sheet is as high as 2000K, and the temperature of the resistance heater can reach more than 2500°C during the heating process. Therefore, the materials used must have high melting point, high temperature strength and high chemical stability.
MOCVD heater and core parts include rhenium sheets, rhenium bars, rhenium rods, molybdenum-rhenium alloy wires, molybdenum-rhenium alloy rods, molybdenum-rhenium alloy sheets, molybdenum-rhenium alloy foils, tungsten-rhenium thermocouple wires, tungsten-rhenium alloy wires, tungsten-rhenium alloy rods or other customized products.
MOCVD heater and core parts include rhenium sheets, rhenium bars, rhenium rods, molybdenum-rhenium alloy wires, molybdenum-rhenium alloy rods, molybdenum-rhenium alloy sheets, molybdenum-rhenium alloy foils, tungsten-rhenium thermocouple wires, tungsten-rhenium alloy wires, tungsten-rhenium alloy rods or other customized products.
 |
 |
 |
 |
If there is any interest in tungsten products, please feel free to contact us through the following methods.
Email: sales@chinatungsten.com
Tel.: +86 592 512 9696/+86 592 512 9595
More info>>
Hot Zone Parts of Sapphire Growth
High Temperature Furnace Parts